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Seminars»12.11.2015 - Ralph Peter Brinkmann : The Electrical Field in a Capacitively Coupled RF Discharge: An Advanced Algebraic Approximation

12.11.2015 - Ralph Peter Brinkmann : The Electrical Field in a Capacitively Coupled RF Discharge: An Advanced Algebraic Approximation

The Electrical Field in a Capacitively Coupled RF Discharge: An Advanced Algebraic Approximation

Ralph Peter Brinkmann
Department of Theoretical Electrical Engineering, Ruhr-Universität, Bochum, Germany
12 November 2015, Thursday, 14:40
Cavid Erginsoy Seminar Room, Physics Department, 3rd floor

Abstract: The electric field in a radio-frequency driven capacitively coupled plasma (RF-CCP) is studied, taking dynamic (finite electron mass) and thermal (finite electron temperature) effects into account. Under the assumption that the ratios of the electron Debye length to the minimum plasma gradient length (typically the sheath thickness) and of the RF frequency to the electron plasma frequency are small but finite, a systematic asymptotic expansion of an electron fluid model is carried out up to quadratic order inclusively. An expression for the electric field is obtained which yields i) the space charge field in the sheath, ii) the generalized Ohmic and ambipolar field in the plasma bulk, and iii) a smooth interpolation for the transition in between. The model may be viewed as an extension to the well-known step model introduced by Godyak.

Reminder: Tea and cookies will be in the seminar room before the seminar.